Following are some informations concerning the posted lab data about the XPS lab demonstration. 


1. Group F1 has acquired spectra without sputtering (F - not sputtered) and after 5min of sputtering (F - 5min sputtered). 

2. Group F2 has acquired spectra after 10min of sputtering (F - 10min sputtered) and after 15min of sputtering (F - 15min sputtered). The sample and its position has not been changed. 

3. The *.tif-files named "Depth profile - C/O/Si" show all acquired energy scans of the respective element during the depth profile survey. 

4. The *.tif-file named "Depth profile - Si shift" shows only those scans that were recorded at a sputter depth in the vicinity of the interface of the specimen in order to better show the peak shift. 

5. The "Target factor analysis" - files show the result after distinguishing between elemental Si and Si in SiO2.