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As part of a "Wright Project" entitled
"Case Center for Surface Engineering,"
SCSAM will install a new transmission
electron microscope in 2009. This
instrument will be a LIBRA 200FE made by
Zeiss. This instrument operates with an
accelerating voltage of 200 kV. It
is first Zeiss instrument that combines the
versatility of a new, aberration-corrected
in-column OMEGA energy filter with the
advantages of a field-emission gun and
Köhler illumination. The OMEGA filter
provides fully integrated filtered imaging
and spectroscopy capabilities for
comprehensive and complementary studies of
materials. The OMEGA filter is pre-aligned
and provides ease of operation in EFTEM
(energy-filtering TEM), EELS (electron
energy-loss spectrometry), HRTEM
(high-resolution TEM), STEM (scanning TEM),
and selected-area and convergent-beam
electron diffraction work. Moreover, since
this new filter is corrected for
2nd order aberrations, it
provides large isochromatic sample viewing
areas and diffraction angle acceptance at
sub-eV energy resolution. Excellent
instrument performance further results from
an advanced 300 mm column concept
and a newly developed control electronics
for sub-ppm stability. The LIBRA 200FE is
operated through dedicated control panels
and a graphical user interface (WinTEM)
designed for convenience and consistent
look-and-feel operation. The instrument for
SCSAM will be equipped with a
high-resolution objective-lens pole piece,
providing superior resolution in still
imaging and STEM.
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